Edwin C. Weldon
11Patents
11h-index
24Co-inventors
64Inventor score
Filing activity: Apr 26, 1996 → Mar 12, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6108189A | Electrostatic chuck having improved gas conduits | Emerging Cross-Sectional Technologies | 138 | Expired |
| US5720818A | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Emerging Cross-Sectional Technologies | 81 | Expired |
| US6263829A | Process chamber having improved gas distributor and method of manufacture | Chemistry; Metallurgy | 67 | Expired |
| US6440221B2 | Process chamber having improved temperature control | Electricity | 61 | Expired |
| US6721162B2 | Electrostatic chuck having composite dielectric layer and method of manufacture | Emerging Cross-Sectional Technologies | 51 | Expired |
| US6414834B1 | Dielectric covered electrostatic chuck | Emerging Cross-Sectional Technologies | 29 | Expired |
| US5729423A | Puncture resistant electrostatic chuck | Emerging Cross-Sectional Technologies | 26 | Expired |
| US5904776A | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5986875A | Puncture resistant electrostatic chuck | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6220607A | Thermally conductive conformal media | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6899798B2 | Reusable ceramic-comprising component which includes a scrificial surface layer | Performing Operations; Transporting | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.