Reduced diffusion of a mobile specie from a metal oxide ceramic into the substrate

US6204158A · kind A · utility

Assignees

• ADVANCED TECHNOLOGY & MATERIALS CO., LTD. · US
• Infineon Technologies North America Corp. · US

Inventors

• Bryan C. Hendrix · Danbury, US
• Frank Hintermaier · Hersbruck, DE
• Jeffrey F. Roeder · Brookfield, US
• Thomas H. Baum · New Fairfield, US
• Debra A. Desrochers · Brookfield, US

Key dates

• Filing date: Dec 18, 1998
• Grant date: Mar 20, 2001
• Expiry date: Dec 18, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/684

Abstract

A scavenger layer is provided to prevent the diffusion of an excess mobile specie from a metal oxide ceramic into unwanted parts of a device. The scavenger layer is provided above the metal oxide ceramic. As the excess mobile specie diffuses out of the metal oxide ceramic, it migrates toward the scavenger layer and reacts with it. The reaction consumes the excess mobile specie.