Reduced degradation of metal oxide ceramic due to diffusion of a mobile specie therefrom

US6350643B1 · kind B1 · utility

Assignees

• ADVANCED TECHNOLOGY & MATERIALS CO., LTD. · US
• Infineon Technologies AG · DE

Inventors

• Frank Hintermaier · Hersbruck, DE
• Jeffrey F. Roeder · Brookfield, US
• Bryan C. Hendrix · Danbury, US
• Debra A. Desrochers · Brookfield, US
• Thomas H. Baum · New Fairfield, US

Key dates

• Filing date: Dec 18, 1998
• Grant date: Feb 26, 2002
• Expiry date: Dec 18, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02271
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

Reduced diffusion of excess mobile specie from a metal oxide ceramic is achieved by tailoring the composition an/or deposition parameters. A barrier layer which reacts with the excess mobile specie is provided below the metal oxide ceramic to prevent or reduce the diffusion of the excess mobile specie through the bottom electrode and into the substrate.