Method and apparatus for optical detection of effluent composition
US6366346B1 · kind B1 · utility
39Cited by
12References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1998 |
| Grant date | Apr 2, 2002 |
| Priority date | — |
| Expiry date | Nov 19, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for determining the composition of an effluent stream from a vacuum processing chamber. A cell placed in the effluent stream from the vacuum processing chamber creates a glow discharge from the constituents in the effluent stream. An optical detector measures a particular wavelength corresponding to the presence of a particular species. In one embodiment the output from the optical detector is used to determine the endpoint of a chamber cleaning process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.