Dual damascene arrangement for metal interconnection with oxide dielectric layer and low K dielectric constant layer
US6380091B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1999 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Jan 27, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/1036
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming a dual damascene structure in a semiconductor device arrangement forms a first dielectric layer made of an oxide dielectric material over an underlying metal interconnect layer, such as a copper interconnect layer. A nitride etch stop layer is formed on the first dielectric layer, and a second dielectric layer, made of low k dielectric material, is formed on the nitride etch stop layer. A via is etched into the first dielectric layer, and a trench is then etched into the second dielectric layer. The materials if the first and second dielectric layers are different from one another so that they have different sensitivity to at least one etchant chemistry. Undercutting in the first dielectric layer is thereby prevented during the etching of the trench in the second dielectric layer by employing an etch chemistry that etches only the second dielectric layer and not the first dielectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.