Process of enclosing via for improved reliability in dual damascene interconnects
US6383920B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2001 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Jan 10, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates generally to a method of enclosing a via in a dual damascene process. In one embodiment of the disclosed method, the via is etched first and a first barrier metal or liner is deposited in the via, the trench is then etched and a second barrier metal or liner is deposited in the trench, and finally the via and trench are filled or metallized in a dual damascene process, thereby forming a via or interconnect and a line. Alternatively, the trench may be etched first and a first barrier metal or liner deposited in the trench, then the via is etched and a second barrier metal or liner is deposited in the via, and finally the trench and via are filled or metallized in a dual damascene process. The barrier metal or liner encloses the via, thereby reducing void formation due to electromigration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.