Method of detecting abnormalities in flow rate in pressure-type flow controller
US6450190B2 · kind B2 · utility
28Cited by
3References
5Claims
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Key dates
| Filing date | Apr 6, 2001 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Apr 6, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8326
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice—the pressure-type flow controller wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated by the equation QC=KP1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal QY between the calculated flow rate QC and the set flow rate QS.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.