Electrostatic chuck having improved electrical connector and method
US6462928B1 · kind B1 · utility
38Cited by
29References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 1999 |
| Grant date | Oct 8, 2002 |
| Priority date | — |
| Expiry date | May 7, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck 55 comprises an electrical connector 140 which is connected to the electrode 105 to conduct an electrical charge to the electrode 105. The electrical connector 140 comprises a refractory metal having a melting temperature of at least about 1500° C., such as for example, tungsten, titanium, nickel, tantalum, molybdenum, or alloys thereof. Preferably, the electrical connector 140 is bonded to the electrode 105 by a metal having a softening temperature of less than about 600° C., such as aluminum, indium, or low melting point alloys.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.