Patent · US Expired

Optical view port for chemical mechanical planarization endpoint detection

US6488568B1 · kind B1 · utility

18Cited by

12References

12Claims

0Family size

Assignee

Lam Research Corporation · US

Inventors

Randolph Treur · Pleasanton, US
John M. Boyd · Atascadero, US
Stephan Wolf · San Luis Obispo, US

Key dates

Filing date	Nov 14, 2000
Grant date	Dec 3, 2002
Priority date	—
Expiry date	Jan 20, 2021

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24D7/12
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

An optical endpoint system for a CMP system with a viewport located off-center on the platen, said view port being adjustable in height so that the window of the viewport can be made flush with the top of the polishing pad.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.