Method of fabricating thermally stable MTJ cell and apparatus
US6544801B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2000 |
| Grant date | Apr 8, 2003 |
| Priority date | — |
| Expiry date | Jan 7, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N35/01
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An MTJ cell including an insulator layer of material between magnetic material layers with the insulator layer of material having a greater attraction for a third material than the magnetic material layers. The third material is introduced to one or both so that when the cell is heated the third material is redistributed from the magnetic material layer to the insulator layer. Upon redistribution the insulator layer becomes an insulator layer material. Also, a first diffusion barrier layer is positioned between a first metal electrode and one of the magnetic material layers and/or a second diffusion barrier layer is positioned between a second metal electrode and the other magnetic material layer to prevent diffusion of the metal in the electrodes into the magnetic material layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.