Patent · US Expired

Dual silicon-on-insulator device wafer die

US6558994B2 · kind B2 · utility

31Cited by
1References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 1, 2001
Grant dateMay 6, 2003
Priority date
Expiry dateJul 19, 2021

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S438/967
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A silicon-on-insulator semiconductor device and manufacturing method therefor is provided in which a single wafer die contains a transistor over an insulator layer to form a fully depleted silicon-on-insulator device and a transistor formed in a semiconductor island over an insulator structure on the semiconductor wafer forms a partially depleted silicon-on-insulator device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.