Semiconductor analysis arrangement and method therefor

US6700659B1 · kind B1 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Srikar V. Chunduri · Austin, US
• Glen Gilfeather · Helotes, US
• Brennan V. Davis · Austin, US
• David H. Eppes · Austin, US
• Victoria J. Bruce · Austin, US
• Michael R. Bruce · Austin, US
• Rosalinda M. Ring · Austin, US
• Daniel L. Stone · Austin, US

Key dates

• Filing date: Apr 19, 2001
• Grant date: Mar 2, 2004
• Expiry date: Oct 9, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/9501
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The operability of light-based semiconductor die analysis is enhanced using a method and arrangement that can detect light leakage between a light source and a die. In one example embodiment of the present invention, a light source is directed to a semiconductor analysis arrangement using, for example, a fiber optic cable. The analysis arrangement is adapted to use light from the light source for analyzing the die. A light detection arrangement detects a condition of light leakage from the system and generates a signal representing the condition of light leakage. The generated signal can then be used to control the semiconductor analysis arrangement, such as by deactivating the light source in response to a detected leak, or by allowing the light source to function in response to not detecting a leak.