Determination of a process flow based upon fault detection analysis
US6740534B1 · kind B1 · utility
18Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2002 |
| Grant date | May 25, 2004 |
| Priority date | — |
| Expiry date | Sep 30, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and an apparatus for the determination of a process flow based upon fault detection. A process step upon a workpiece is performed. Fault detection analysis based upon the process step performed upon the workpiece is performed. A workpiece routing process is performed based upon the fault detection analysis. The wafer routing process includes using a controller to perform one or a rework process routing, a non-standard process routing, a fault verification process routing, a normal process routing, or a termination process routing, based upon the fault detection analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.