Multi-core transformer plasma source
US6755150B2 · kind B2 · utility
39Cited by
28References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2001 |
| Grant date | Jun 29, 2004 |
| Priority date | — |
| Expiry date | Oct 18, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32431
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A transformer-coupled plasma source using toroidal cores forms a plasma with a high-density of ions along the center axis of the torus. In one embodiment, cores of a plasma generator are stacked in a vertical alignment to enhance the directionality of the plasma and generation efficiency. In another embodiment, cores are arranged in a lateral array into a plasma generating plate that can be scaled to accommodate substrates of various sizes, including very large substrates. The symmetry of the plasma attained allows simultaneous processing of two substrates, one on either side of the plasma generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.