Inspection method and inspection apparatus
US6777967B2 · kind B2 · utility
7Cited by
7References
3Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Aug 20, 2001 |
| Grant date | Aug 17, 2004 |
| Priority date | — |
| Expiry date | Sep 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.