Illumination system with a plurality of individual gratings

US6836530B2 · kind B2 · utility

Assignees

• Carl Zeiss SMT GmbH · DE
• ASML NETHERLANDS B.V. · NL

Inventors

• Wolfgang Singer · Aalen, DE
• Markus Weiss · Aalen, DE
• Bernd Kleemann · Aalen, DE
• Karlfried Osterried · Aalen, DE
• Johannes Wangler · Oberkochen, DE
• Frank Melzer · Utzmemmingen, DE
• Andreas Heisler · Steinheim, DE
• Vadim Yevgenyevich Banine · Deurne, NL

Key dates

• Filing date: Jun 5, 2002
• Grant date: Dec 28, 2004
• Expiry date: Jun 5, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K1/06
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

There is provided an illumination system for wavelengths of ≦100 nm, having an object plane and a field plane. The illumination system includes a grating element having a plurality of gratings, and a diaphragm. The diaphragm is arranged after the grating element in a beam path from the object plane to the field plane.