Fiber optic semiconductor analysis arrangement and method therefor

US6844928B1 · kind B1 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Glen Gilfeather · Helotes, US
• Srikar V. Chunduri · Austin, US
• Brennan V. Davis · Austin, US
• David H. Eppes · Austin, US
• Victoria J. Bruce · Austin, US
• Michael R. Bruce · Austin, US
• Rosalinda M. Ring · Austin, US
• Daniel L. Stone · Austin, US

Key dates

• Filing date: Apr 19, 2001
• Grant date: Jan 18, 2005
• Expiry date: Oct 15, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/9501
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The operability of light-based semiconductor die analysis is enhanced using a method and arrangement that directs light between a light source and a die. In one example embodiment of the present invention, a light source is directed to a die in a semiconductor analysis arrangement using a fiber optic cable. The analysis arrangement is adapted to use light received via the fiber optic cable to analyze the die. The analysis includes one or more light-based applications, such as stimulating a selected portion of the die with the light and detecting a response therefrom. In this manner, light can be directed to a die in a variety of analysis implementations, such as for analyzing a die in a test chamber.