Apparatus and method for detecting photon emissions from transistors
US6891363B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2002 |
| Grant date | May 10, 2005 |
| Priority date | — |
| Expiry date | Sep 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.