Method of determining the endpoint of a planarization process

US6932674B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Peter Lahnor · Dresden, DE
• Olaf Kuehn · Suhl, DE
• Andreas Roemer · Dresden, DE
• Alexander William Simpson · Wappingers Falls, US

Key dates

• Filing date: Mar 5, 2003
• Grant date: Aug 23, 2005
• Expiry date: Mar 5, 2023

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B24B49/00
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

A method of determining the endpoint of a planarizing process is disclosed. An endpoint detection signal is selectively sampled from at least one predetermined location within a planarizing region defined on a planarizing web. Planarization is stopped when the endpoint criterion based on the endpoint detection signal is detected.