Inventor · Dresden, DE

Peter Lahnor

12Patents
3h-index
27Co-inventors
56Inventor score

Filing activity: Jan 27, 2000 → Jan 31, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6153492A Method for improving the readability of alignment marks Electricity 13 Expired
US6695687B2 Semiconductor substrate holder for chemical-mechanical polishing containing a movable plate Performing Operations; Transporting 7 Expired
US7894240B2 Method and apparatus for reducing charge trapping in high-k dielectric material Physics 4 Active
US6689691B2 Method of simultaneously polishing a plurality of objects of a similar type, in particular silicon wafers, on a polishing installation Electricity 2 Expired
US6932674B2 Method of determining the endpoint of a planarization process Performing Operations; Transporting 2 Expired
US7776759B2 Methods for forming an integrated circuit, including openings in a mold layer from nanowires or nanotubes Emerging Cross-Sectional Technologies 2 Active
US8138538B2 Interconnect structure for semiconductor devices Electricity 1 Active
US6787431B2 Method and semiconductor wafer configuration for producing an alignment mark for semiconductor wafers Emerging Cross-Sectional Technologies 0 Expired
US10530273B2 Unfolding bridge, inverter having reactive-power capability, and polarity reversing method Emerging Cross-Sectional Technologies 0 Active
US6821894B2 CMP process Electricity 0 Expired
US6827635B2 Method of planarizing substrates Performing Operations; Transporting 0 Expired
US6893968B2 Defect-minimizing, topology-independent planarization of process surfaces in semiconductor devices Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.