Scanning electron microscope and sample observing method using it
US6963067B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 5, 2004 |
| Grant date | Nov 8, 2005 |
| Priority date | — |
| Expiry date | Jan 5, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.