Patent · US Expired

Spatial and temporal selective laser assisted fault localization

US6967491B2 · kind B2 · utility

18Cited by
9References
48Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 9, 2004
Grant dateNov 22, 2005
Priority date
Expiry dateJul 9, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/311
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and apparatus for laser-assisted fault mapping which synchronizes the laser control with the tester unit. The inventive method provides for laser-assisted pseudo-static fault mapping to localize defects in a device whose inputs are being stimulated dynamically by a tester. It further provides for laser-assisted dynamic soft error mapping, to localize in terms of location and to correlate with respect to a specific test vector, sensitive areas in a device by utilizing device performance criteria such as pass-fail status outputs. The apparatus includes a fully controllable dynamic laser stimulation apparatus connected to a control unit that provides complete synchronization with a tester unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.