Vertical proximity processor
US7069937B2 · kind B2 · utility
36Cited by
21References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2003 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | Nov 3, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for processing a substrate is provided which includes generating a fluid meniscus on the surface of the vertically oriented substrate, and moving the fluid meniscus over the surface of the vertically oriented substrate to process the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.