Device for inhibiting hydrogen damage in ferroelectric capacitor devices
US7071506B2 · kind B2 · utility
6Cited by
4References
11Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 5, 2003 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | Jan 14, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B53/30
Abstract
A ferroelectric capacitor device comprises a substrate, a contact plug passing through the substrate, a first electrode formed on the substrate, the first electrode being electrically connected to said plug, a ferroelectric layer formed on the first electrode, a second electrode formed on the ferroelectric layer, one or more first encapsulation layers on the second electrode, the encapsulation layers extending over the device, and one or more hydrogen storage material layers on the encapsulation layers. One or more second encapsulation layers may be formed on the one or more hydrogen storage material layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.