Ulrich Egger
16Patents
3h-index
17Co-inventors
46Inventor score
Filing activity: Sep 27, 2002 → Apr 18, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6746877B1 | Encapsulation of ferroelectric capacitors | Electricity | 12 | Expired |
| US7015049B2 | Fence-free etching of iridium barrier having a steep taper angle | Electricity | 9 | Expired |
| US7071506B2 | Device for inhibiting hydrogen damage in ferroelectric capacitor devices | Electricity | 6 | Expired |
| US7045837B2 | Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing | Electricity | 3 | Expired |
| US7042705B2 | Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing | Electricity | 3 | Expired |
| US6762064B1 | Process for fabrication of a ferrocapacitor | Electricity | 2 | Expired |
| US6897501B2 | Avoiding shorting in capacitors | Electricity | 2 | Expired |
| US6924156B2 | Method for forming a ferroelectric capacitor device | Electricity | 2 | Expired |
| US7316980B2 | Method for forming ferrocapacitors and FeRAM devices | Electricity | 1 | Expired |
| US6734057B2 | Method of patterning capacitors and capacitors made thereby | Electricity | 1 | Expired |
| US7504680B2 | Semiconductor device and mask pattern | Electricity | 1 | Expired |
| US6867053B2 | Fabrication of a FeRAM capacitor using a noble metal hardmask | Electricity | 0 | Expired |
| US6785119B2 | Ferroelectric capacitor and process for its manufacture | Electricity | 0 | Expired |
| US7001781B2 | Method for producing a ferroelectric capacitor that includes etching with hardmasks | Electricity | 0 | Expired |
| US7098142B2 | Method of etching ferroelectric devices | Electricity | 0 | Expired |
| US7001780B2 | Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.