Zoom in pin nest structure, test vehicle having the structure, and method of fabricating the structure
US7154115B2 · kind B2 · utility
3Cited by
3References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2003 |
| Grant date | Dec 26, 2006 |
| Priority date | — |
| Expiry date | Jul 25, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A test vehicle (100) comprises a substrate (99), a plurality of nested serpentine lines (202) on the substrate, and a plurality of test pads (204) on the substrate. Each serpentine line has a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment. Each of the plurality of test pads is connected to a respective turn section of a respective one of the nested serpentine lines. Each pair of test pads connected to one of the subset of the nested serpentine lines has at least a respectively different turn section portion connected therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.