Shielded probe for high-frequency testing of a device under test

US7304488B2 · kind B2 · utility

Assignee

• Cascade Microtech, Inc. · US

Inventors

• K. Reed Gleason · Portland, US
• Tim Lesher · Portland, US
• Eric W. Strid · Portland, US
• Mike Andrews · Cornelius, US
• John Martin · Portland, US
• John Dunklee · Tigard, US
• Leonard Hayden · Beaverton, US
• Amr M. E. Safwat · Cairo, EG

Key dates

• Filing date: Dec 1, 2006
• Grant date: Dec 4, 2007
• Expiry date: Dec 1, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/06777
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A shielded probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe may include a probe tip that extends through a dielectric substrate that supports on a first surface a signal path to test instrumentation and on a second surface a ground path that shields both the signal path and the probe tip.