Scrubber box

US7377002B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Joseph Yudovsky · Campbell, US
• Avi Tepman · Cupertino, US
• Kenneth R. Reynolds · Middleport, US
• Younes Achkire · San Francisco, US
• Dan Marohl · San Jose, US
• Steve Ghanayem · Los Altos, US
• Alexander S. Polyak · Palm Coast, US
• Gary C. Ettinger · Cupertino, US
• Haochuan Zhang · Beijing, CN
• Hui Chen · Burlingame, US

Key dates

• Filing date: Oct 28, 2004
• Grant date: May 27, 2008
• Expiry date: Nov 28, 2025

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B08B1/34
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.