Patent · US Active

Shielded probe with low contact resistance for testing a device under test

US7436194B2 · kind B2 · utility

8Cited by

953References

20Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

K. Reed Gleason · Portland, US
Tim Lesher · Portland, US
Eric W. Strid · Portland, US
Mike Andrews · Cornelius, US
John Martin · Portland, US
John Dunklee · Tigard, US
Leonard Hayden · Beaverton, US
Amr M. E. Safwat · Cairo, EG

Key dates

Filing date	Oct 24, 2007
Grant date	Oct 14, 2008
Priority date	—
Expiry date	Oct 24, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06777
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe measurement system having low, stable contact resistance for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.