Shielded probe for testing a device under test

US7489149B2 · kind B2 · utility

Assignee

• Cascade Microtech, Inc. · US

Inventors

• K. Reed Gleason · Portland, US
• Tim Lesher · Portland, US
• Eric W. Strid · Portland, US
• Mike Andrews · Cornelius, US
• John Martin · Portland, US
• John Dunklee · Tigard, US
• Leonard Hayden · Beaverton, US
• Amr M. E. Safwat · Cairo, EG

Key dates

• Filing date: Oct 24, 2007
• Grant date: Feb 10, 2009
• Expiry date: Oct 24, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/06777
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal oath and the probe tip.