Methods and apparatus for generating a library of spectra

US7840375B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Abraham Ravid · Cupertino, US
• Boguslaw A. Swedek · Cupertino, US
• Dominic J. Benvegnu · La Honda, US
• Jeffrey Drue David · San Jose, US
• Jun Qian · Sunnyvale, US
• Sidney P. Huey · Fremont, US
• Ingemar Carlsson · Milpitas, US
• Lakshmanan Karuppiah · San Jose, US
• Harry Q. Lee · Los Altos, US

Key dates

• Filing date: Mar 31, 2008
• Grant date: Nov 23, 2010
• Expiry date: Aug 31, 2028

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67766
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method of generating a library from a reference substrate for use in processing product wafers is described. The method includes measuring substrate characteristics at a plurality of well-defined points of a reference substrate, measuring spectra at plurality of measurement points of the reference substrate, there being more measurement points than well-defined points, and associating measured spectra with measured substrate characteristics.