Chuck for holding a device under test
US7876115B2 · kind B2 · utility
3Cited by
783References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2009 |
| Grant date | Jan 25, 2011 |
| Priority date | — |
| Expiry date | Feb 17, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chuck includes a conductive element that contacts a device under test in a location on the chuck. The chuck includes an upper surface for supporting a device under test and a conductive element that extends through the chuck to the upper surface of the chuck. The conductive element is electrically isolated from the upper surface of the chuck, and makes electrical contact with any device under test supported by the chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.