Patent · US Active

Method for determining intensity distribution in the image plane of a projection exposure arrangement

US7961297B2 · kind B2 · utility

1Cited by

12References

25Claims

0Family size

Assignee

Carl Zeiss SMS Ltd. · IL

Inventors

Joern Greif-Wuestenbecker · Marburg, DE
Beate Boehme
Ulrich Stroessner · Jena, DE
Michael Totzeck · Schwäbisch Gmünd, DE
Vladimir Kamenov · Oberkochen, DE
Olaf Dittmann · Bopfingen, DE
Daniel Kraehmer · Aalen, DE
Toralf Gruner · Hennef (Sieg), DE
Bernd Geh · Scottsdale, US

Key dates

Filing date	Sep 2, 2006
Grant date	Jun 14, 2011
Priority date	—
Expiry date	Mar 26, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70308
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method for determining intensity distribution in the focal plane of a projection exposure arrangement, in which a large aperture imaging system is emulated and a light from a sample is represented on a local resolution detector by an emulation imaging system. A device for carrying out the method and emulated devices are also described. The invention makes it possible to improve a reproduction quality since the system apodisation is taken into consideration. The inventive method includes determining the integrated amplitude distribution in an output pupil, combining the integrated amplitude distribution with a predetermined apodization correction and calculating a corrected apodization image according to the modified amplitude distribution.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.