Method and apparatus for gas flow measurement
US7975558B2 · kind B2 · utility
4Cited by
8References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2010 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Jun 25, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for measuring gas flow are provided. In one embodiment, a calibration circuit for gas control may be utilized to verify and/or calibrate gas flows utilized for backside cooling, process gas delivery, purge gas delivery, cleaning agent delivery, carrier gases delivery and remediation gas delivery, among others.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.