Scott Coston
13Patents
5h-index
18Co-inventors
59Inventor score
Filing activity: Apr 23, 2002 → Aug 23, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6813003B2 | Advanced illumination system for use in microlithography | Physics | 10 | Expired |
| US6775069B2 | Advanced illumination system for use in microlithography | Physics | 9 | Expired |
| US7006295B2 | Illumination system and method for efficiently illuminating a pattern generator | Physics | 8 | Expired |
| US7079321B2 | Illumination system and method allowing for varying of both field height and pupil | Physics | 6 | Expired |
| US7187430B2 | Advanced illumination system for use in microlithography | Physics | 5 | Expired |
| US6888615B2 | System and method for improving linewidth control in a lithography device by varying the angular distribution of light in an illuminator as a function of field position | Physics | 4 | Expired |
| US10466601B2 | Alignment sensor for lithographic apparatus | Physics | 3 | Active |
| US8164740B2 | Illumination system coherence remover with two sets of stepped mirrors | Physics | 2 | Active |
| US8013979B2 | Illumination system with low telecentricity error and dynamic telecentricity correction | Physics | 1 | Active |
| US6784976B2 | System and method for improving line width control in a lithography device using an illumination system having pre-numerical aperture control | Physics | 1 | Expired |
| US7158307B2 | Efficiently illuminating a modulating device | Physics | 1 | Expired |
| US8159651B2 | Illumination system coherence remover with a series of partially reflective surfaces | Physics | 0 | Active |
| US8164739B2 | Controlling fluctuations in pointing, positioning, size or divergence errors of a beam of light for optical apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.