Three dimensional vertical E-fuse structures and methods of manufacturing the same

US8232190B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Kerry Bernstein · Underhill, US
• Timothy J. Dalton · Ridgefield, US
• Jeffrey P. Gambino · Gresham, US
• Mark D. Jaffe · Shelburne, US
• Stephen E. Luce · Underhill, US
• Anthony K. Stamper · Williston, US

Key dates

• Filing date: Oct 1, 2007
• Grant date: Jul 31, 2012
• Expiry date: Oct 25, 2028

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Three dimensional vertical e-fuse structures and methods of manufacturing the same are provided herein. The method of forming a fuse structure comprises providing a substrate including an insulator layer and forming an opening in the insulator layer. The method further comprises forming a conductive layer along a sidewall of the opening and filling the opening with an insulator material. The vertical e-fuse structure comprises a first contact layer and a second contact layer. The structure further includes a conductive material lined within a via and in electrical contact with the first contact layer and the second contact layer. The conductive material has an increased resistance as a current is applied thereto.