Inventor · Underhill, VT, US

Stephen E. Luce

67Patents
16h-index
61Co-inventors
87Inventor score

Filing activity: Dec 21, 1989 → Nov 10, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US5219788A Bilayer metallization cap for photolithography Emerging Cross-Sectional Technologies 286 Expired
US7193423B1 Wafer-to-wafer alignments Electricity 204 Expired
US5985762A Method of forming a self-aligned copper diffusion barrier in vias Electricity 197 Expired
US6153043A Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing Electricity 82 Expired
US5654221A Method for forming semiconductor chip and electronic module with integrated surface interconnects/components Electricity 53 Expired
US7781781B2 CMOS imager array with recessed dielectric Electricity 50 Active
US4944682A Method of forming borderless contacts Electricity 32 Expired
US7335577B2 Crack stop for low K dielectrics Electricity 31 Expired
US5731246A Protection of aluminum metallization against chemical attack during photoresist development Emerging Cross-Sectional Technologies 26 Expired
US7015150B2 Exposed pore sealing post patterning Electricity 23 Expired
US5384281A Non-conformal and oxidizable etch stops for submicron features Emerging Cross-Sectional Technologies 20 Expired
US7884475B2 Conductor structure including manganese oxide capping layer Electricity 20 Active
US7521336B2 Crack stop for low K dielectrics Electricity 19 Active
US5480748A Protection of aluminum metallization against chemical attack during photoresist development Emerging Cross-Sectional Technologies 19 Expired
US6251787A Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing Electricity 19 Expired
US5486267A Method for applying photoresist Emerging Cross-Sectional Technologies 16 Expired
US8013342B2 Double-sided integrated circuit chips Electricity 16 Active
US7361989B1 Stacked imager package Electricity 14 Active
US6426557B1 Self-aligned last-metal C4 interconnection layer for Cu technologies Electricity 13 Expired
US8232190B2 Three dimensional vertical E-fuse structures and methods of manufacturing the same Electricity 13 Active
US7670927B2 Double-sided integrated circuit chips Electricity 12 Active
US8546240B2 Methods of manufacturing integrated semiconductor devices with single crystalline beam Electricity 7 Active
US7521798B2 Stacked imager package Electricity 6 Active
US6504203B2 Method of forming a metal-insulator-metal capacitor for dual damascene interconnect processing and the device so formed Emerging Cross-Sectional Technologies 5 Expired
US8284017B2 Structure having substantially parallel resistor material lengths Physics 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.