Patent · US Active

Roller assembly for a brush cleaning device in a cleaning module

US8250695B2 · kind B2 · utility

2Cited by

5References

12Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Lakshmanan Karuppiah · San Jose, US
Dan Zhang · San Diego, US
Simon Yavelberg · Cupertino, US
Jim K. Atkinson · Los Gatos, US
Hung Chih Chen · San Jose, US
Noel Manto · American Canyon, US
Jonathan P. Domin · Sunnyvale, US

Key dates

Filing date	Oct 5, 2009
Grant date	Aug 28, 2012
Priority date	—
Expiry date	Feb 10, 2031

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB08B1/34
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.