Method and apparatus for decorrelation of spatially and temporally coherent light
US8363320B2 · kind B2 · utility
1Cited by
8References
20Claims
0Family size
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Key dates
| Filing date | Apr 27, 2011 |
| Grant date | Jan 29, 2013 |
| Priority date | — |
| Expiry date | Apr 27, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/48
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.