Inventor · Nanhu, CN

Jiping Li

43Patents
11h-index
32Co-inventors
75Inventor score

Filing activity: Jun 10, 1998 → Aug 26, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7026175B2 High throughput measurement of via defects in interconnects Electricity 129 Expired
US8067302B2 Defect-free junction formation using laser melt annealing of octadecaborane self-amorphizing implants Electricity 96 Active
US6049220A Apparatus and method for evaluating a wafer of semiconductor material Electricity 75 Expired
US6054868A Apparatus and method for measuring a property of a layer in a multilayered structure Physics 53 Expired
US6489801B1 Apparatus and method for evaluating a semiconductor wafer Electricity 35 Expired
US8148663B2 Apparatus and method of improving beam shaping and beam homogenization Performing Operations; Transporting 32 Active
US6940592B2 Calibration as well as measurement on the same workpiece during fabrication Physics 24 Expired
US6812047B1 Evaluating a geometric or material property of a multilayered structure Electricity 21 Expired
US8829392B2 Apparatus and method of improving beam shaping and beam homogenization Performing Operations; Transporting 15 Active
US6906801B2 Measuring a property of a layer in multilayered structure Electricity 14 Expired
US8254767B2 Method and apparatus for extended temperature pyrometry Electricity 13 Active
US8652951B2 Selective epitaxial germanium growth on silicon-trench fill and in situ doping Electricity 11 Active
US6911349B2 Evaluating sidewall coverage in a semiconductor wafer Physics 10 Expired
US7465591B2 Evaluating a geometric or material property of a multilayered structure Electricity 9 Expired
US7379185B2 Evaluation of openings in a dielectric layer Electricity 7 Expired
US8674257B2 Automatic focus and emissivity measurements for a substrate system Physics 4 Active
US8582963B2 Detection of substrate warping during rapid thermal processing Mechanical Engineering; Lighting; Heating 4 Active
US9659809B2 Support cylinder for thermal processing chamber Electricity 3 Active
US9908200B2 Apparatus and method of improving beam shaping and beam homogenization Performing Operations; Transporting 3 Active
US8970963B2 Multiple beam combiner for laser processing apparatus Physics 2 Active
US8588831B2 Method and base station for sending information Emerging Cross-Sectional Technologies 2 Active
US7804042B2 Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer Performing Operations; Transporting 2 Active
US10128144B2 Support cylinder for thermal processing chamber Electricity 2 Active
US10421151B2 Laser noise elimination in transmission thermometry Physics 1 Active
US9385004B2 Support cylinder for thermal processing chamber Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.