Auto-sequencing multi-directional inline processing apparatus
US8444364B2 · kind B2 · utility
9Cited by
17References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2010 |
| Grant date | May 21, 2013 |
| Priority date | — |
| Expiry date | Nov 17, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49948
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.