Patent · US Active

Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions

US8475599B2 · kind B2 · utility

6Cited by
100References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 18, 2006
Grant dateJul 2, 2013
Priority date
Expiry dateSep 8, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67051
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method for making a solution for use in preparing a surface of a substrate is provided. The method includes providing a continuous medium that adds a polymer material to the continuous medium. A fatty acid is adding to the continuous medium having the polymer material, and the polymer material defines a physical network that exerts forces in the solution that overcome buoyancy forces experienced by the fatty acid, thus preventing the fatty acids from moving within the solution until a yield stress of the polymer material is exceeded by an applied agitation. The applied agitation is from transporting the solution from a container to a preparation station that applies the solution to the surface of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.