Method and apparatus for particle removal
US8480810B2 · kind B2 · utility
4Cited by
49References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2006 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Oct 4, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67051
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method and system for cleaning a surface, having particulate matter thereon, of a substrate features impinging upon the surface a jet of a liquid having coupling elements entrained therein. A sufficient drag force is imparted upon the coupling elements to have the same move with respect to the liquid and cause the particulate matter to move with respect to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.