Drive laser for EUV light source
US8514486B2 · kind B2 · utility
0Cited by
12References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2010 |
| Grant date | Aug 20, 2013 |
| Priority date | — |
| Expiry date | Sep 30, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/02
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device comprising a laser source producing a continuous output on a beam path and an amplifier is disclosed. The device further includes a partially transmissive, partially reflective optic disposed on said beam path between said laser source and said amplifier. The device further includes a droplet generator positioned to deliver a droplet moving on a path intersecting said beam path, the droplet reflecting light to establish an optical cavity with said optic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.