Norbert Bowering
35Patents
14h-index
32Co-inventors
77Inventor score
Filing activity: Jul 3, 2002 → May 31, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6972421B2 | Extreme ultraviolet light source | Electricity | 86 | Expired |
| US7164144B2 | EUV light source | Physics | 79 | Expired |
| US6815700B2 | Plasma focus light source with improved pulse power system | Electricity | 69 | Expired |
| US7368741B2 | Extreme ultraviolet light source | Electricity | 45 | Expired |
| US7671349B2 | Laser produced plasma EUV light source | Electricity | 40 | Active |
| US7872245B2 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Electricity | 40 | Active |
| US7217940B2 | Collector for EUV light source | Electricity | 40 | Expired |
| US7465946B2 | Alternative fuels for EUV light source | Physics | 29 | Active |
| US7598509B2 | Laser produced plasma EUV light source | Physics | 27 | Active |
| US7193228B2 | EUV light source optical elements | Physics | 22 | Expired |
| US7843632B2 | EUV optics | Emerging Cross-Sectional Technologies | 19 | Active |
| US7589337B2 | LPP EUV plasma source material target delivery system | Electricity | 15 | Active |
| US7453077B2 | EUV light source | Electricity | 15 | Active |
| US7394083B2 | Systems and methods for EUV light source metrology | Physics | 14 | Expired |
| US7109503B1 | Systems for protecting internal components of an EUV light source from plasma-generated debris | Physics | 12 | Expired |
| US7365351B2 | Systems for protecting internal components of a EUV light source from plasma-generated debris | Physics | 9 | Active |
| US7732793B2 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source | Physics | 8 | Active |
| US7525111B2 | High repetition rate laser produced plasma EUV light source | Electricity | 8 | Active |
| US7323703B2 | EUV light source | Physics | 6 | Active |
| US7309871B2 | Collector for EUV light source | Electricity | 6 | Active |
| US7288778B2 | Collector for EUV light source | Electricity | 5 | Active |
| US7960701B2 | EUV light source components and methods for producing, using and refurbishing same | Physics | 5 | Active |
| US8035092B2 | Laser produced plasma EUV light source | Electricity | 5 | Active |
| US9392678B2 | Target material supply apparatus for an extreme ultraviolet light source | Electricity | 4 | Active |
| US8598549B2 | EUV optics | Emerging Cross-Sectional Technologies | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.