Gas line weldment design and process for CVD aluminum
US8535443B2 · kind B2 · utility
2Cited by
12References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2006 |
| Grant date | Sep 17, 2013 |
| Priority date | — |
| Expiry date | Oct 17, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/9029
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system of gas lines for a processing chamber and a method of forming a gas line system for a processing chamber are provided. The system of gas lines includes electropolished multi-way valves that connect electropolished linear gas lines. By using multi-way valves rather than tee-fittings and electropolishing the linear gas lines, the nucleation of contaminating particles in the system of gas lines may be reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.