Inventor · Menlo Park, CA, US

Alan A. Ritchie

40Patents
4h-index
44Co-inventors
59Inventor score

Filing activity: Nov 4, 2005 → Sep 22, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9812303B2 Configurable variable position closed track magnetron Electricity 33 Active
US9580796B2 Deposition apparatus and methods to reduce deposition asymmetry Electricity 32 Active
US7824743B2 Deposition processes for titanium nitride barrier and aluminum Electricity 22 Active
US7422664B2 Method for plasma ignition Electricity 5 Expired
US9177763B2 Method and apparatus for measuring pressure in a physical vapor deposition chamber Electricity 4 Active
US8790499B2 Process kit components for titanium sputtering chamber Electricity 4 Active
US10692706B2 Methods and apparatus for reducing sputtering of a grounded shield in a process chamber Electricity 3 Active
US10741835B1 Anode structure for a lithium metal battery Emerging Cross-Sectional Technologies 3 Active
US9087679B2 Uniformity tuning capable ESC grounding kit for RF PVD chamber Electricity 3 Active
US9315891B2 Methods for processing a substrate using multiple substrate support positions Electricity 2 Active
US8846451B2 Methods for depositing metal in high aspect ratio features Electricity 2 Active
US7857947B2 Unique passivation technique for a CVD blocker plate to prevent particle formation Emerging Cross-Sectional Technologies 2 Active
US8865012B2 Methods for processing a substrate using a selectively grounded and movable process kit ring Electricity 2 Active
US8795487B2 Physical vapor deposition chamber with rotating magnet assembly and centrally fed RF power Electricity 2 Active
US8647484B2 Target for sputtering chamber Electricity 2 Active
US8535443B2 Gas line weldment design and process for CVD aluminum Emerging Cross-Sectional Technologies 2 Active
US8702918B2 Apparatus for enabling concentricity of plasma dark space Electricity 1 Active
US8563428B2 Methods for depositing metal in high aspect ratio features Chemistry; Metallurgy 1 Active
US9303311B2 Substrate processing system with mechanically floating target assembly Electricity 1 Active
US8795488B2 Apparatus for physical vapor deposition having centrally fed RF energy Electricity 1 Active
US11162170B2 Methods for reducing material overhang in a feature of a substrate Electricity 1 Active
US9028659B2 Magnetron design for extended target life in radio frequency (RF) plasmas Electricity 1 Active
US9957601B2 Apparatus for gas injection in a physical vapor deposition chamber Electricity 1 Active
US9593410B2 Methods and apparatus for stable substrate processing with multiple RF power supplies Electricity 1 Active
US7389645B2 Radiation shield for cryogenic pump for high temperature physical vapor deposition Chemistry; Metallurgy 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.