Apparatus for VHF impedance match tuning

US8578879B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Kartik Ramaswamy · San Jose, US
• Hiroji Hanawa · Sunnyvale, US
• Kenneth S. Collins · San Jose, US
• Lawrence Wong · Fremont, US
• Samer Banna · San Jose, US
• Andrew Nguyen · San Jose, US

Key dates

• Filing date: Jul 29, 2009
• Grant date: Nov 12, 2013
• Expiry date: Apr 11, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01P7/04
• WIPO field: Telecommunications
• WIPO sector: Electrical engineering

Abstract

Embodiments of impedance matching networks are provided herein. In some embodiments, an impedance matching network may include a coaxial resonator having an inner and an outer conductor. A tuning capacitor may be provided for variably controlling a resonance frequency of the coaxial resonator. The tuning capacitor may be formed by a first tuning electrode and a second tuning electrode and an intervening dielectric, wherein the first tuning electrode is formed by a portion of the inner conductor. A load capacitor may be provided for variably coupling energy from the inner conductor to a load. The load capacitor may be formed by the inner conductor, an adjustable load electrode, and an intervening dielectric.