Patent · US Active

Illumination design for lens heating mitigation

US8625078B2 · kind B2 · utility

1Cited by

4References

6Claims

0Family size

Assignee

NANYA TECHNOLOGY CORPORATION · TW

Inventors

Jianming Zhou · Suzhou, CN
Scott L. Light · Boise, US
Dan B. Millward · Boise, US
Yuan He · Boise, US
Kaveri Jain · Boise, US
Lijing Gou · Boise, US
Zishu Zhang · Boise, US
Anton J. deVilliers · Boise, US
Michael Hyatt · Boise, US

Key dates

Filing date	Apr 6, 2011
Grant date	Jan 7, 2014
Priority date	—
Expiry date	Nov 15, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70125
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method for reducing the effects of lens heating of a lens in an imaging process includes determining heat load locations on the lens according to an illumination source and a reticle design, obtaining a lens response characterization according to the heat load locations, and utilizing the heat load locations and the lens response characterization to generate a lens heating sensitivity map.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.