Advanced process control optimization
US8655469B2 · kind B2 · utility
3Cited by
5References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2011 |
| Grant date | Feb 18, 2014 |
| Priority date | — |
| Expiry date | Jan 7, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70525
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for automatic process control (APC) performance monitoring may include, but is not limited to: computing one or more APC performance indicators for one or more production lots of semiconductor devices; and displaying a mapping of the one or more APC performance indicators to the one or more production lots of semiconductor devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.